Handbook of Sputter Deposition Technology: Principles, Technology and Applications
| By: | Wasa, Kiyotaka; Hayakawa, Shigeru |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780815512806 |
| eText ISBN: | 9780815517740 |
| Edition: | 0 |
| Format: | Page Fidelity |
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