Handbook of Silicon Based MEMS Materials and Technologies
| By: | Lindroos, Veikko; Lindroos, Veikko; Franssila, Sami; Tilli, Markku; Paulasto-Krockel, Mervi; Lehto, |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780815515944 |
| eText ISBN: | 9780815519881 |
| Edition: | 0 |
| Format: | Page Fidelity |
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